Method for operating a polishing head and method for polishing a substrate
作者： Shich-Chang Suen , Yung-Cheng Lu , Chin-Hsiang Chan , Liang-Guang Chen
DOI:
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摘要: A method for operating a polishing head is provided. The includes keeping stator of at least one electromagnetism actuated pressure sector stationary with respect to carrier head, and electromagnetically linearly moving an active cell the move head.
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