作者: Holger Torwesten , Markus Schwerd , Thomas Goebel , Martin Seck , Heinrich Körner
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摘要: An integrated circuit and fabrication method are presented. The includes a capacitor containing base electrode, covering dielectric between the electrodes. contains an oxide of material contained in which may be produced by anodic oxidation. A peripheral edge is uncovered electrode. layer on cutout adjacent to dielectric. During fabrication, protects electrode that anodically oxidized from chemicals, also surrounding regions precision resistor fabricated simultaneously with capacitor.