Nanocrystalline antimony doped tin oxide (ATO) thin films: A thermal restructuring study
作者： J. Montero , C. Guillén , J. Herrero
DOI: 10.1016/J.SURFCOAT.2011.07.068
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摘要: Abstract Antimony doped tin oxide (ATO) is a transparent conducting (TCO) with promising applications for solar energy utilization and savings. In addition it has been shown how thin ATO layer deposited on top of other TCOs could act as protective coating against high temperature processes due to its good thermal stability. widely studied previously; however the role played by oxygen vacancies together antimony doping, their structural arrangement annealing restructuring remains unclear. present work films are DC magnetron sputtering at room from metallic target onto soda-lime glass substrates. As samples amorphous or nanocrystalline structures, well different electrical optical properties depending deposition parameters. Then, post-deposition performed 250 °C 450 °C in air nitrogen atmosphere order study not only evolution electrical, but also conduction mechanism.
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