Method for the deposition of microcrystalline silicon on a substrate
作者： Aad Gordijn , Thilo Kilper , Bernd Rech , Sandra Schicho
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摘要: The invention relates to a method for depositing microcrystalline silicon on substrate in plasma chamber system, comprising the following steps: system contains at least one reactive, silicon-containing gas and hydrogen or exclusively before is initiated; mixture continuously fed once has been initiated, concentration of that being set more than 0.5 percent; performance adjusted within range 0.1 2.5 W/cm2 electrode surface, deposition rate exceeding nm/s selected, monocrystalline layer deposited thickness less 1000 nanometers.
lens.org 参考文章(12)
Yoshiyuki Nasuno, Photoelectric conversion device and method of producing the same ,(2008)
O Vetterl, F Finger, R Carius, P Hapke, L Houben, O Kluth, A Lambertz, A Mück, B Rech, H Wagner, Intrinsic microcrystalline silicon: A new material for photovoltaics Solar Energy Materials and Solar Cells. ,vol. 62, pp. 97- 108 ,(2000) , 10.1016/S0927-0248(99)00140-3
J. Woerdenweber, T. Merdzhanova, R. Schmitz, A. Mück, U. Zastrow, L. Niessen, A. Gordijn, R. Carius, W. Beyer, H. Stiebig, U. Rau, Influence of base pressure and atmospheric contaminants on a-Si:H solar cell properties Journal of Applied Physics. ,vol. 104, pp. 094507- ,(2008) , 10.1063/1.3009384
T. Roschek, T. Repmann, J. Müller, B. Rech, H. Wagner, Comprehensive study of microcrystalline silicon solar cells deposited at high rate using 13.56 MHz plasma-enhanced chemical vapor deposition Journal of Vacuum Science and Technology. ,vol. 20, pp. 492- 498 ,(2002) , 10.1116/1.1450585
B Rech, O Kluth, T Repmann, T Roschek, J Springer, J Müller, F Finger, H Stiebig, H Wagner, New materials and deposition techniques for highly efficient silicon thin film solar cells Solar Energy Materials and Solar Cells. ,vol. 74, pp. 439- 447 ,(2002) , 10.1016/S0927-0248(02)00114-9
O Vetterl, A Lambertz, A Dasgupta, F Finger, B Rech, O Kluth, H Wagner, Thickness dependence of microcrystalline silicon solar cell properties Solar Energy Materials and Solar Cells. ,vol. 66, pp. 345- 351 ,(2001) , 10.1016/S0927-0248(00)00193-8
P. Torres, J. Meier, R. Flückiger, U. Kroll, J. A. Anna Selvan, H. Keppner, A. Shah, S. D. Littelwood, I. E. Kelly, P. Giannoulès, Device grade microcrystalline silicon owing to reduced oxygen contamination Applied Physics Letters. ,vol. 69, pp. 1373- 1375 ,(1996) , 10.1063/1.117440
J.K Rath, Low temperature polycrystalline silicon: a review on deposition, physical properties and solar cell applications Solar Energy Materials and Solar Cells. ,vol. 76, pp. 431- 487 ,(2003) , 10.1016/S0927-0248(02)00258-1
O. Vetterl, M. Hülsbeck, J. Wolff, R. Carius, F. Finger, Preparation of microcrystalline silicon seed-layers with defined structural properties Thin Solid Films. ,vol. 427, pp. 46- 50 ,(2003) , 10.1016/S0040-6090(02)01237-3
Luc Feitknecht, Johannes Meier, Pedro Torres, Jerôme Zürcher, Arvind Shah, Plasma deposition of thin film silicon: kinetics monitored by optical emission spectroscopy Solar Energy Materials and Solar Cells. ,vol. 74, pp. 539- 545 ,(2002) , 10.1016/S0927-0248(02)00073-9