From cyclotetrasilazane [(CH3)2SiNH]4 via crystalline silicon nitride imide Si2N2NH to α‐Si3N4
作者： Sabine Schaible , Ralf Riedel , Elisabeth Werner , Uwe Klingebiel
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摘要: α-Si3N4 is synthesized by an ammonia thermal synthesis using a cyclic oligosilazane, [(CH3)2SiNH]4, as the starting material. [(CH3)2SiNH]4 reacts in presence of at 900°C and 80 MPa pressure to give silicon nitride imide (Si2N2NH). Subsequently, Si2N2NH converted into decomposition 1500°C 0.1 nitrogen with simultaneous loss NH3.
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