Experimental Work on Micro Laser-Assisted Diamond Turning of Silicon (111)
作者： Hossein Mohammadi , Deepak Ravindra , Sai K. Kode , John A. Patten
DOI: 10.1016/J.JMAPRO.2015.06.007
关键词:
摘要: … One of the most common problems in machining single crystal silicon is the crystallographic orientation effect. In this situation, single point diamond turned silicon shows radial spokes …
sci-hub.se 参考文章(24)
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