The dynamics of reactive ion sputtering of SnSb and InSn alloys in an ArO2 atmosphere
作者： E. Leja , A. Kołodziej , T. Pisarkiewicz , T. Stapiński
DOI: 10.1016/0040-6090(81)90699-4
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摘要: Abstract The mechanism of the reactive sputtering SnSb and InSn alloys in a atmosphere was investigated. oxygen content mixture composition target influence properties films.
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