Miniature magnetometer-accelerometer

摘要: A magnetometer is integrated with a miniature vibrating beam accelerometer fabricated out of silicon on common substrate. Dual pendulum-DETF force sensing accelerometers have conductor coils the pendulums that circulate alternating current to cause an additional pendulum motion also sensed by DETF transducers for local earth magnetic field. The and acceleration used each three reference axes in triaxial inclinometer borehole drill steering surveying.