Analysis of a sample collector which collects sputtered material from a sample using e.g. secondary ion mass spectromy
作者： Henri-Noel Migeon , Georges Slodzian , Tom Wirtz
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摘要: The present invention relates to a method and an analytical instrument for quantitative investigations of organic inorganic samples using the Secondary Ion Mass Spectromy (SIMS) technique, wherein sputtering process is decoupled from analysis process.
lens.org 参考文章(4)
R.G. Meisenheimer, Some 14 MeV neutron sputtering characteristics of a polycrystalline Nb sample Journal of Nuclear Materials. ,vol. 63, pp. 429- 431 ,(1976) , 10.1016/0022-3115(76)90360-3
F.J Ager, M.A Respaldiza, A Paúl, J.A Odriozola, J.M Lobato, M.F da Silva, L.M Redondo, J.C Soares, Analysis of the elements sputtered during the lanthanum implantation in stainless steels Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms. ,vol. 139, pp. 344- 349 ,(1998) , 10.1016/S0168-583X(97)00967-1
P.K. Kuiri, B. Joseph, J. Ghatak, H.P. Lenka, G. Sahu, B.S. Acharya, D.P. Mahapatra, Observation of ZnS nanoparticles sputtered from ZnS films under 2MeV Au irradiation Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. ,vol. 248, pp. 25- 30 ,(2006) , 10.1016/J.NIMB.2006.03.196
K. Wittmaack, Experimental and theoretical investigations into the origin of cross-contamination effects observed in a quadrupole-based SIMS instrument Applied Physics A. ,vol. 38, pp. 235- 252 ,(1985) , 10.1007/BF00616059