Optical device, optical module, semiconductor apparatus and its manufacturing method, and electronic apparatus
作者： Norio Imaoka
DOI:
关键词:
摘要: The invention provides an optical device that enables a mutual electrical connection between the stacked semiconductor substrates to be realized with ease and high reliability provide for miniaturization. has first substrate having part pad, second integrated circuit pad which is under substrate, through-hole continuously extending through conductive so formed as include inside of through-hole.
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