Coating liquid for forming metal oxide thin film, metal oxide thin film, field-effect transistor, and method for manufacturing field-effect transistor
作者： Ryoichi Saotome , Mikiko Takada , Naoyuki Ueda , Yukiko Abe , Shinji Matsumoto
DOI:
关键词:
摘要: To provide a coating liquid for forming metal oxide film, containing: an indium compound; at least one selected from the group consisting of magnesium compound, calcium strontium and barium compound containing maximum positive value oxidation number which is IV, V, VI; organic solvent.
google.de 参考文章(52)
Shigekazu Tomai, Futoshi Utsuno, Masashi Kasami, Hirokazu Kawashima, Kazuyoshi Inoue, Koki Yano, Patterned crystalline semiconductor thin film, method for producing thin film transistor and field effect transistor ,(2008)
Yuki Murayama, Takahito Nagano, Masaya Yukinobu, Yoshihiro Otsuka, Method of manufacturing transparent conductive film, the transparent conductive substrate using the film, as well as device using the substrate ,(2010)
Naoki Yamada, Kazuhisa Onazawa, Metal compound solution and thin film formation using the same ,(2001)
Joohye Jung, You Seung Rim, Hyun Jae Kim, Dong Lim Kim, Compositions used in formation of oxide material layers, methods of forming an oxide material layer using the same, and methods of fabricating a thin film transistor using same ,(2012)
Yong-Hyun Kim, Boem-Jin Yoo, Won-Mok Kim, Min-jae Ko, Nam-Gyu Park, Kyung-Kon Kim, Photo-electrode comprising conductive non-metal film, and dye-sensitized solar cell comprising the same ,(2009)
Tetsuji Narasaki, Yoshihiro Tokunaga, Masataka Inuzuka, Hiroki Inagaki, Tetsuya Takeuchi, Transparent laminated film and method for producing the same ,(2009)
Do Hwan Kim, Hyun Sik Moon, Jung Seok Hahn, Jong Jin Park, Nitrogen-containing heteroaromatic ligand-transition metal complexes, buffer layer comprising the complexes and organic thin film transistor comprising the buffer layer ,(2007)
Jae-Woo Joung, Hye-Jin Cho, Tae-hoon Kim, Sung-Il Oh, Conductive ink composition for inkjet printing ,(2007)
Scott Haubrich, Alfred I-Tsung Pan, Yoocham Jeon, Printable compositions having anisometric nanostructures for use in printed electronics ,(2003)
Si Joon Kim, Dong Lim Kim, You Seung Rim, Woong Hee Jeong, Doo Na Kim, Doo Hyun Yoon, Hyun Jae Kim, The formation of InZnO lattices incorporating Ba for thin-film transistors using a solution process Journal of Crystal Growth. ,vol. 326, pp. 163- 165 ,(2011) , 10.1016/J.JCRYSGRO.2011.01.088