Capacitively coupled rf discharge with a large amount of microparticles: Spatiotemporal emission pattern and microparticle arrangement.

摘要: The effect of micron-sized particles on a low-pressure capacitively coupled rf discharge is studied both experimentally and using numerical simulations. In the laboratory experiments, microparticle clouds occupying considerable fraction volume are supported against gravity with help thermophoretic force. spatiotemporally resolved optical emission measurements performed different arrangements microparticles. simulations carried out basis one-dimensional hybrid (fluid-kinetic) model describing interaction between plasma microparticles in self-consistent way. study focused role arrangement interpreting spatiotemporal measurements. We show that it not possible to reproduce simultaneously observed pattern framework considered model. This disagreement can be attributed two-dimensional effects (e.g., radial diffusion components) or lack proper description sharp void boundary frame fluid approach.