ENCAPSULATED THERMIONIC ENERGY CONVERTER WITH STIFFENED SUSPENSION

摘要: This paper reports a prototype of mechanically and thermally robust encapsulated microfabricated thermionic energy converter (μ-TEC). We used conformal sidewall deposition poly-SiC to form stiff suspension legs with U-shaped cross sections, which increase the out-of-plane rigidity prevent contact substrate during heating suspended emitter—a qualitative improvement over previously reported planar SiC μ-TECs [1]. Furthermore, we tested new both barium oxide coatings. The coatings reduced work function emitter as low ~2.14 eV increased current by 5-6 orders magnitude, is key step toward realizing highly efficient converter. In addition, have sealed small arrays using an anodically bonded pyrex wafer.