W-CVD with fluorine-free tungsten nucleation

Christophe Marcadal , Karl A. Littau , Seshadri Ganguli , Ping Jian

34
2002
Method and apparatus for calibrating a thermistor

Scott Jong Ho Limb , Karl A. Littau , Michael Yu Tak Young

16
2009
Wafer edge deposition elimination

Karl A. Littau , Dashun S. Zhou , Aihua Chen

51
2000
In Situ Characterization of Ferroelectric HfO2 During Rapid Thermal Annealing

Valerio Adinolfi , Michael F. Toney , Martin E. McBriarty , Vijay Kris Narasimhan
Physica Status Solidi-rapid Research Letters 15 ( 5) 2000598

7
2021
Chemical rate model for the surface pyrolysis of tetrakis(dimethylamido)titanium to form titanium nitride films

Anthony J. Toprac , John A. Iacoponi , Karl A. Littau
Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV 3507 100 -106

1998
Microbead-separated thermionic energy converter with enhanced emission current.

Karl A. Littau , Kunal Sahasrabuddhe , Dustin Barfield , Hongyuan Yuan
Physical Chemistry Chemical Physics 15 ( 34) 14442 -14446

25
2013
Conformal deposition of GeTe films with tunable Te composition by atomic layer deposition

Lanxia Cheng , Valerio Adinolfi , Stephen L. Weeks , Sergey V. Barabash
Journal of Vacuum Science and Technology 37 ( 2) 020907

13
2019
CO2 extraction from seawater using bipolar membrane electrodialysis

Matthew D. Eisaman , Keshav Parajuly , Alexander Tuganov , Craig Eldershaw
Energy and Environmental Science 5 ( 6) 7346 -7352

141
2012
CO2 desorption using high-pressure bipolar membrane electrodialysis

Matthew D. Eisaman , Luis Alvarado , Daniel Larner , Peng Wang
Energy and Environmental Science 4 ( 10) 4031 -4037

81
2011
Composition-Controlled Atomic Layer Deposition of Phase-Change Memories and Ovonic Threshold Switches with High Performance.

Valerio Adinolfi , Lanxia Cheng , Mario Laudato , Ryan C. Clarke
ACS Nano 13 ( 9) 10440 -10447

8
2019
Engineering of Ferroelectric HfO2-ZrO2 Nanolaminates.

Stephen L. Weeks , Ashish Pal , Vijay K. Narasimhan , Karl A. Littau
ACS Applied Materials & Interfaces 9 ( 15) 13440 -13447

68
2017
Investigation of the Changes in Electronic Properties of Nickel Oxide (NiOx) Due to UV/Ozone Treatment.

Raisul Islam , Gang Chen , Pranav Ramesh , Junkyo Suh
ACS Applied Materials & Interfaces 9 ( 20) 17201 -17207

72
2017
CO2 separation using bipolar membrane electrodialysis

Matthew D. Eisaman , Luis Alvarado , Daniel Larner , Peng Wang
Energy and Environmental Science 4 ( 4) 1319 -1328

169
2011
Chemical Vapor deposition (CVD) TiN: a barrier metallization for submicron via and contact applications

Karl A. Littau , Rod Mosely , M. Eizenberg , Hung V. Tran
Microelectronics Technology and Process Integration 2335 189 -202

2
1994
Crystal Phase Distribution and Ferroelectricity in Ultrathin HfO 2 -ZrO 2 Bilayers

Martin E. McBriarty , Vijay K. Narasimhan , Stephen L. Weeks , Ashish Pal
Physica Status Solidi B-basic Solid State Physics 257 ( 1) 1900285

19
2020
Microfabricated silicon carbide thermionic energy converter for solar electricity generation

Jae Hyung Lee , Igor Bargatin , Thomas O. Gwinn , Maxime Vincent
international conference on micro electro mechanical systems 1261 -1264

20
2012
ALD Heterojunction Ovonic Threshold Switches

Valerio Adinolfi , Mario Laudato , Ryan Clarke , Scott Jewhurst
ACS Applied Electronic Materials 2 ( 12) 3818 -3824

3
2020
Current compliance layers and memory arrays comprising thereof

Weeks Stephen , Littau Karl , Narasimhan Vijay Kris , Barabash Sergey

1
2020
ENCAPSULATED THERMIONIC ENERGY CONVERTER WITH STIFFENED SUSPENSION

J.H. Lee , I. Bargatin , K. Iwami , K.A. Littau
2012 Solid-State, Actuators, and Microsystems Workshop Technical Digest

4
2012