Ultra-high precision MEMS accelerometer
作者： Y Dong , P Zwahlen , AM Nguyen , R Frosio , F Rudolf
DOI: 10.1109/TRANSDUCERS.2011.5969218
关键词:
摘要: … Closed-loop MEMS accelerometers can considerably reduce … Tests show that MEMS accelerometers, which operate in such … MEMS accelerometers penetrate more and more high-end …
sci-hub.se 参考文章(5)
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