Deposition of BaTiO3 thin films by a hybrid DC-field enhanced PLD-process
作者： A Husmann , M Mertin , T Klotzbücher , E.W Kreutz
DOI: 10.1016/S0169-4332(96)00624-1
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摘要: BaTiO3 thin films are deposited onto (111)-Si/Ti/Pt using a hybrid DC-field enhanced pulsed laser deposition (PLD)-technique with excimer radiation. Space- and time-resolved plasma emission spectroscopy (PES) is used for determination of the mean velocity particle species within plasma/vapour. The structural properties characterised by XRD-measurements micro-Raman spectroscopy. electrical analysed impedance measurements. electric field influences number excited ionised particles ambient gas plasma, caused discharge in interaction between plasma. process allows production crystalline tetragonal phase at reduced temperatures. Dielectric constants up to er=320 obtained.
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