Development of a Highly Sensitive Humidity Sensor Based on a Piezoelectric Micromachined Ultrasonic Transducer Array Functionalized with Graphene Oxide Thin Film.
作者： Changhe Sun , Qiongfeng Shi , Mahmut Yazici , Chengkuo Lee , Yufei Liu
DOI: 10.3390/S18124352
关键词:
摘要: … linear pMUT array based humidity sensor functionalized with a GO thin film was designed, … of the GO film and investigate the humidity-sensing properties of the pMUT humidity sensor. …
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