Surface Analysis Methods for Contaminant Identification

摘要: When selecting a method for surface contaminant analysis one must consider factors such as the size, shape, morphology, composition, volatility, concentration, and history of both substrate contaminant. In addition, decide whether study should provide qualitative or quantitative results what specific type information is required. Auger electron spectroscopy (AES), X-ray photoelectron (XPS), time-of-flight secondary ion mass spectrometry (TOF-SIMS), low-energy scattering (LEIS) are four classical methods, each capable sub-monolayer contaminants. These methods differ significantly in applicability particle analysis. LEIS XPS require particles 100 10 mm diameters, respectively. contrast, sub-micrometer requires use TOF-SIMS AES with AES, having smallest size 10 nm diameter. Whenever elemental insufficient identification, choice. This particularly true organic materials. Often choice between can be made based on complete unknown which excels needs to identified excels. Minimum detection-limit often deciding factor selection. generally have limited sensitivity being only slightly more sensitive.