Characterization of a d.c. titanium tetraisopropoxide/H2N2 plasma using emission spectroscopy
作者： B. Kuzƒlakowska-Pawlak , W. Żyrnicki
DOI: 10.1016/0040-6090(95)06636-5
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摘要: Abstract The analysis of the gaseous phase a d.c. plasma-assisted chemical vapour deposition plasma operating with (TiTP)H 2 N mixture has been performed by optical emission spectroscopy. Highly energetic components have identified. A correlation between intensities excited species in and cathode temperature composition studied.
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