Integrated Piezoresistive Force and Position Detection Sensors for Micro-Handling Applications

摘要: This paper presents two integrated piezoresistive sensors capable of detecting simultaneously both the contact force and position a micro-object in micro-handling applications. The first sensor detects 1-D vertical direction along surface. second extends sensing principle on 2-D devices combine outputs groups piezoresistors Wheatstone bridge configurations, allowing computation position. are fabricated with an IC-compatible process can be tools such as micro-grippers. characterized by applying forces onto surface at pre-defined positions. With applied ~ 1 mN, has resolution μN detection accuracy 2-3 μm. estimated range detectable is 3 mN sensitivity 2.8 V/N obtained effective supply voltage 177 mV across bridge. up to 20 under measured noise 30 μV. theoretical spatial 5μm x y directions mN. designed handle micro-objects sizes 25-250 concept device not limited applications micro-grippers used other tools.