Preparation of finely-divided refractory powders of groups III-V metal borides, carbides, nitrides, silicides and sulfides

摘要: The preparation of metal and metalloid carbides, borides, nitrides silicides sulfides by reaction in the vapor phase corresponding vaporous halide, e.g., chloride, with a source carbon, boron, nitrogen, silicon or sulfur respectively reactor is described. Reactants can be introduced into through reactant inlet nozzle assembly. Inhibition often substantial elimination product growth on exposed surfaces such assembly accomplished introducing substantially anhydrous hydrogen principal mixing zone.