Interferometric fiber optic displacement sensor

摘要: A method is presented to produce a change in the optical path length gap between two single mode fibers proportional lateral displacement of either fiber end normal its axis. This done with use refraction or diffraction at interface guiding and non-guiding media direction propagation light gap. also for laying waveguide on cantilever so that tip produces by distancing from neutral axis cantilever. The supported as deposited micromachined incorporated an interferometer which made totally silicon substrate integrated-optic technology. resonant element form micro-bridge ridge frequency output readily digitizeable immune laser noise. Finally, monolithic mechanical means phase modulation are provided same sensor substrate. vibrating electrically optically.