Scanning probe microscope utilizing an optical element in a waveguide for dividing the center part of the laser beam perpendicular to the waveguide

摘要: A scanning probe microscope according to the present invention comprises a cantilever having free end portion and fixed portion, bearing thereon, semiconductor laser attached of cantilever, an optical waveguide for guiding beam, emitted from laser, element dividing part center beam guided through waveguide, into beams in at least two perpendicular directions, photoelectric transducer receiving divided converting electrical output signals corresponding thereto, differential circuit subjecting predetermined arithmetic processing, thereby detecting three-dimensional displacement cantilever.