Substrate drying device, drying method and substrate dried by the same

摘要: A substrate drying device includes a reduced pressure enclosure including an airproof door, and exhaustion device. Inside of the is caused to be sealed state when door closed. After which application material applied received into enclosure, closed make inside state. Subsequently, exhausted by perform for eliminating air bubbles in on substrates. The may include reserve tank that has volume capable rapidly reducing internal maintain predetermined negative pressure. rapid performed connecting enclosure.