Method of and apparatus for drying articles

摘要: Method of and apparatus for drying articles (18), in particular which are used electronics require clean-room conditions their manufacture. Drying according to the method invention uses a partial vacuum storage at least one air blast across article by opening storage. The wetness on is blown off high velocity. can be repeated until there only residual moisture left article. This removed evaporation vacuum. comprises process chamber (14) articles. has inlet openings (34) distributed over its transverse sectional area outlet (26) positioned opposite openings. also tank (16, 30) connected interior via poppet-valve (28) closes entire actuated instantaneously open opening. allow fast under conditions. readily integratable into clean-bench allows automation operation. For requires less energy no chemicals harmful environment.