Vorrichtung und Verfahren zum Ablösen von Partikeln auf Gegenständen

作者: Sykora Juergen

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摘要: The present invention describes a process and device for removing particles from objects, especially as an alternative to ultrasonic or chemical cleaning. objects be cleaned are inserted in chamber (14) which is closed by plate (24). (18) then moistened wetting (42). evacuated until the moisture on has become ice. ice coating liquefied again repressurising chamber. easily removed surface of this step process. This optionally comprises subsequent drying It environment-friendly suitable particular highly sensitive objects.

参考文章(7)
D'arcy Lorimer, Edward Baker, Kang Ho Ahn, Benjamin Y.H. Liu, Apparatus and method for particle removal by forced fluid convection ,(1990)
Bradley L. Griswold, Syed A. Husain, Method for low pressure rinsing and drying in a process chamber ,(1992)
Poss Gerhard, Freund Hans-Ulrich Dr, Lierke Ernst-Guenter Dr, Friehmelt Volker Dipl Chem, Surface decontamination - with a cryogenically embrittled surface layer removed by mechanical means ,(1993)
Kang Ho Ahn, Benjamin Y.H. Liu, Particle removal from surfaces by pressure change ,(1990)
Lev S. Verkhorubov, Sergei P. Zhuravkov, Arkady T. Mikhailov, Anatoly B. Sviridov, Jury M. Ospischev, Jury L. Bakhmutov, Valery S. Shaidurov, Evgeny A. Cherepenko, Leonid N. Karmadonov, Vladimir V. Bordunov, Vladimir A. Fedjunin, Method of cleaning workpieces and an apparatus for carrying out the method ,(1988)