作者: Sykora Juergen
DOI:
关键词:
摘要: The present invention describes a process and device for removing particles from objects, especially as an alternative to ultrasonic or chemical cleaning. objects be cleaned are inserted in chamber (14) which is closed by plate (24). (18) then moistened wetting (42). evacuated until the moisture on has become ice. ice coating liquefied again repressurising chamber. easily removed surface of this step process. This optionally comprises subsequent drying It environment-friendly suitable particular highly sensitive objects.