Vacuum drying of semiconductor fragments
作者： Wilhelm Schmidbauer , Werner Ott , Hanns Wochner
DOI:
关键词: Vacuum drying 、 Semiconductor 、 Materials science 、 Fragment (computer graphics) 、 Analytical chemistry
摘要: A method and apparatus for drying semiconductor fragment material, has at least one vacuum-tight chamber with receiving means there is a maintaining vacuum in the apparatus.
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