Scattered light measuring arrangement for surface roughness investigation - using angular resolution of scattered light received by several receiver arrays arranged on curved holder
作者： Bernd Dr Harnisch , Thomas Weigel , Jakob Neubert , Albrecht Hertzsch , Martin Dr Weiss
DOI:
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摘要: The light scattered from the sample (12) is incident on an array of detectors a curved, possibly semicircular, carrier (17). are positioned so that their geometrical arrangement corresponds to equidistant intervals in spatial frequency range sample. USE - Measuring spatially dependent roughness optically flat surfaces.
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