Apparatus and method for dynamic measurement of surface roughness
作者： David George Goebel , James Glenn Valiant
DOI:
关键词:
摘要: An apparatus for non-contact measuring of surface roughness, comprises a source light (14) positioned directing beam (30) at first angle onto (18) to be measured, segmented multi-element array detector (22) receive specular reflected from the by an intermediate segment and scattered very close adjacent segments, responsive generate signal in response light, segments each second (26) spaced less than that angle, away generating processor receiving processing signals displaying reading corresponding roughness.
lens.org 参考文章(16)
Francois M. Mottier, Rene Dandliker, Device for measuring the roughness of a surface ,(1973)
Benjamin J. Pernick, Optical surface roughness detection method and apparatus ,(1979)
Charles G. Hull-Allen, Joseph M. Geary, Fiber optic scatterometer for measuring optical surface roughness ,(1989)
Roman E. Popil, Paper roughness or glass sensor using polarized light reflection ,(1991)
John R. McNeil, Scott R. Wilson, Two-dimensional optical scatterometer apparatus and process ,(1990)
Devdas Shetty, Henry Neault, Method and apparatus for surface roughness measurement using laser diffraction pattern ,(1991)
William E. Streight, Chester S. Gardner, Surface roughness gauge and method ,(1980)
Guy A. Monfort, Adolphe A. Bragard, Continuous measurement of the surface roughness of a cold-rolled product ,(1986)
Raymond Joseph Castonguay, Apparatus and method of rapidly measuring hemispherical scattered or radiated light ,(1992)
Bernd Dr Harnisch, Thomas Weigel, Jakob Neubert, Albrecht Hertzsch, Martin Dr Weiss, Uwe Schulz, Scattered light measuring arrangement for surface roughness investigation - using angular resolution of scattered light received by several receiver arrays arranged on curved holder ,(1991)