Role of the high-angle BSE in SEM imaging

摘要: For acquisition of secondary (SE) as well backscattered electrons (BSE) in the scanning electron microscope (SEM), single-channel detection systems are traditionally used. We have designed a multi-channel detector collecting BSE emitted to eight intervals polar angles, and tested it also cathode lens mode (CLM) [1]. First experiments showed method suitable for observation polycrystalline targets [2].