A planar cascading architecture for a ceramic Knudsen micropump

摘要: This paper describes a 9-stage Knudsen pump with planar architecture that uses nanoporous ceramic for thermal transpiration. While operating at 55 K above room temperature, the provides maximum pressure head exceeding 12 kPa sealed outlet, or gas flow rate of ≈3.8 µL/min. against 160 Pa. Experiments also demonstrate capability to steer water droplets speeds 1200 µm/s through 250 µm fluorinated ethylene propylene capillary. The packaged volume discussed here is 25×25×7.25 mm3. These characteristics indicate potentially useful in microfluidic systems intended both and liquid phase chemical sensing.