Retarding field analyzer for ion energy distribution measurements at a radio-frequency biased electrode

摘要: A retarding field energy analyzer designed to measure ion distributions impacting a radio-frequency biased electrode in plasma discharge is examined. The compact so that the need for differential pumping avoided. sit on surface, place of substrate, and signal cables are fed out through reactor side port. This prevents modifications rf electrode—as normally case analyzers built into such electrodes. capabilities demonstrated experiments with various bias conditions an inductively coupled reactor. initially grounded measured validated Langmuir probe measurements potential. Ion then given voltage levels, pressures, frequencies—500kHzto30MHz, waveforms—sinusoidal, square, dual frequency.