Planar color filter array for CCDs with embedded color filter elements

作者: Ronald W. Wake , Gilbert Allan Hawkins , Robert Leroy Nielsen , David Lawrence Losee

DOI:

关键词:

摘要: An image sensor and method of making such is described. The includes an integral color filter array, comprising: a semiconductor substrate having optically planar top surface; plurality spaced pixels formed in the substrate; array physically contiguous elements embedded whose bottom surfaces are coplanar which have no overlap layers between adjacent elements.

参考文章(28)
Frederick J. Rauner, Jerry R. Horak, Robert C. Gross, Harold F. Langworthy, Solid-state color imaging devices and method for making them ,(1978)
Masamichi Sato, Kenji Matsumoto, Method for producing a multicolor optical filter ,(1979)
Akira Sasano, Haruo Matsumaru, Ken Tsutsui, Tadao Kaneko, Michiaki Hashimoto, Toshio Nakano, Akiya Izumi, Yoshio Taniguchi, Solid state color imager and method of manufacturing the same ,(1980)
William Andrew Light, Thomas William Martin, Albert Thomas Brault, Method for making a solid-state color imaging device having an integral color filter and the device ,(1976)
Jeffrey Carlyle Blood, Laurel Jean Pace, Color filter arrays ,(1987)
Jeffery Hunninghake, Yih-Wen Chen, Terry Brewer, Dan Hawley, Method of manufacturing a color filter array ,(1993)
Michael Mosehauer, Richard N. Blazey, Domenic Santilli, Peter S. Alexandrovich, Plural imaging component microcellular arrays, processes for their fabrication, and electrographic compositions ,(1980)