Color filters formed on integrated circuits
作者： Jeffrey M. Levy
DOI:
关键词:
摘要: Light transmitting filter elements are formed in holes etched a covering passivation layer overlying light sensing devices an integrated circuit. Filter material is spun on to the wafer fill holes. The cured and back below top surface. Subsequent materials different frequencies may be similarly subsequently holes, cured, form additional elements. A contiguous structure of individual formed.
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