作者: Zhi Liu , Yun Sun , Francisco Machuca , Piero Pianetta , William E. Spicer
DOI: 10.1116/1.1532737
关键词:
摘要: … cleaning steps were performed in an Ar purged glovebox attached to the load lock allowing … vacuum at 500 C. After chemical etching in the solution, elemental As 2 ML, arsenic oxides …