Advances in basic and applied aspects of microwave plasma polymerization

摘要: Abstract Microwave plasma polymerization of organosilicone compounds has several features basic as well applied importance. One these is the attainment high deposition rates, in range hundred angstroms per second. Another ability to “tailor” (that is, vary predictably and reproducibly) film structure properties by controlled variation substrate temperature T s or power density P both: it shown that composition films can be controllably shifted from primarily “organic” characteristics, obtained at low , predominantly “inorganic” character . Together with chemical composition, morphological physicochemical also undergo substantial changes: deposited are free defects adhere strongly their substrate; they dense, have permeability gases vapours display a optical refractive index. The potential value polymers illustrated two examples: inhibition corrosion on coated metal surfaces exposed aggressive media surface modification aromatic polyamide fibres, used reinforce polymer-based composites. Apparatus being developed for pilot- industrial-scale implementation microwave processes.