Characterization of a molybdenum oxide sputtered thin film as a gas sensor
作者： Matteo Ferroni , Vincenzo Guidi , Giuliano Martinelli , Paolo Nelli , Michele Sacerdoti
DOI: 10.1016/S0040-6090(97)00279-4
关键词:
摘要: We report about preparation and characterization of sputtered MoO3 thin film as sensing layer for gas detection. show its capability to detect CO concentrations lower than 10 ppm in wet air, a feature that allows direct usage this material environmental monitoring. The research also highlights some criteria selecting suitable shows which features are important be good candidate chemical sensor.
harvard.edu
elsevier.com
sci-hub.se 参考文章(18)
Marc J. Madou, S. Roy Morrison, Chemical sensing with solid state devices ,(1989)
G. Niebling, Identification of gases with classical pattern-recognition methods and artificial neural networks Sensors and Actuators B-chemical. ,vol. 18, pp. 259- 263 ,(1994) , 10.1016/0925-4005(94)87091-8
J. N. Yao, K. Hashimoto, A. Fujishima, Photochromism induced in an electrolytically pretreated Mo03 thin film by visible light Nature. ,vol. 355, pp. 624- 626 ,(1992) , 10.1038/355624A0
A.F. Jankowski, L.R. Schrawyer, Reactive sputtering of molybdenum Thin Solid Films. pp. 61- 71 ,(1990) , 10.1016/S0040-6090(05)80012-4
Diana Hodgins, The development of an electronic ‘nose’ for industrial and environmental applications Sensors and Actuators B-chemical. ,vol. 27, pp. 255- 258 ,(1995) , 10.1016/0925-4005(94)01597-B
Noboru Yamazoe, Norio Miura, Environmental gas sensing Sensors and Actuators B-chemical. ,vol. 20, pp. 95- 102 ,(1994) , 10.1016/0925-4005(93)01183-5
A. Guerfi, LÊ H. Dao, Electrochromic Molybdenum Oxide Thin Films Prepared by Electrodeposition Journal of The Electrochemical Society. ,vol. 136, pp. 2435- 2436 ,(1989) , 10.1149/1.2097408
G. Sberveglieri, L. Depero, S. Groppelli, P. Nelli, WO3 sputtered thin films for NOx monitoring Sensors and Actuators B-chemical. ,vol. 26, pp. 89- 92 ,(1995) , 10.1016/0925-4005(94)01563-W
F.A. Chudnovskii, D.M. Schaefer, A.I. Gavrilyuk, R. Reifenberger, A study of the morphology of photochromic and thermochromic MoO3 amorphous films using an atomic force microscope Applied Surface Science. ,vol. 62, pp. 145- 149 ,(1992) , 10.1016/0169-4332(92)90139-O
I. Sayago, J. Gutiérrez, L. Arés, J.I. Robla, M.C. Horrillo, J. Getino, J. Rino, J.A. Agapito, The effect of additives in tin oxide on the sensitivity and selectivity to NOx and CO Sensors and Actuators B: Chemical. ,vol. 26, pp. 19- 23 ,(1995) , 10.1016/0925-4005(94)01548-V