Shaped electrodes for micro-electro-mechanical-system (MEMS) devices to improve actuator performance and methods for fabricating the same

摘要: Shaped electrodes for micro-electro-mechanical-system (MEMS) devices to improve actuator performance and methods fabricating the same are disclosed. The shaped utilize its three-dimensional geometry shape an electric field electrostatic actuation MEMS devices. For example, height, width, length, sidewall slope, layout of can be used provide optimum in moving a mirror device. at low operating voltage maximum tilt or angular range motion fabricated simply by using pillar wafer electrode wafer. form pillars as electrodes, or, alternatively, barriers. A single substrate also electrodes.