Micromotion mechanical structure and a process for the production thereof

摘要: In a micromotion mechanical structure, such as vibration-type sensor or step motor, comprising at least one fixed electrode and movable which is moved by electrostatic power applied to the electrode, of electrodes formed essentially single crystal semiconductor material. The material has various merits uniform properties, small internal stress, etc. for use in electrodes. Such structure been realized attaching patterned made another substrate then removing thinning original carrying