LOW PROFILE OPTICAL SENSOR
作者： Syvenkyy Yuriy
DOI:
关键词:
摘要: The invention pertains to a low-profile, optical sensor measure distance having light emitter and sensor. More particularly, the includes focusing film series of blinds filter diffused reflected without need for lens. sensors can be used in variety applications, including using two thickness an object or use 3 determine angle between surfaces. further calibration method more level showerhead chuck semi-conductor deposition apparatus.
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