Laser chemical vapor deposition of patterned Fe on silica glass: Observation and origins of periodic ripple structures
作者： R. B. Jackman , J. S. Foord , A. E. Adams , M. L. Lloyd
DOI: 10.1063/1.336385
关键词:
摘要: Laser chemical vapor deposition of patterned iron deposits on silica glass has been carried out using an Ar ion laser‐driven dissociation pentacarbonyl vapor. The structure the deposited films studied optical, electron, and scanning Auger microscopic techniques. Extensive silicate formation is observed at iron‐glass interface 50‐μm periodic ripples are formed in delineated deposits. origin discussed with reference to available analytical data observations from related laser processing studies.
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