Confocally chromatic sensor for determining coordinates of a measurement object

作者: Christoph Husemann , Nils Haverkamp

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摘要: It is proposed at least one test object (114) a chromatic confocal sensor (110) for determining the coordinates of two different destinations (112). The comprises: first aperture element (124) having perforated elements (126); illumination device (128) which adapted to generate light beam (130) and DUT therethrough illuminate through diaphragm member said (112); optical (142) configured focus portion focal points in plane (144) along an axis (146) (142), have lighting / or chromatically aberrative properties; unit (150), wherein (150) comprises (152), (152) determine wavelength-dependent image content, second (154 ) having; Konfokalblendenelement (156) (164), arranged measurement outgoing detection (158) (154) pass, measured from content; evaluation (162) (112) content.

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