Methods of forming patterns on substrates
作者： Gurtej S. Sandhu , Scott Sills
DOI:
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摘要: A method of forming a pattern on substrate includes spaced first features over substrate. The have opposing lateral sidewalls. Material is formed onto the sidewalls features. That portion such material which received against each different composition from At least one and densified to move at laterally away other form void space between material.
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