摘要: Dielectrics are an important class of thin-film electronic materials for microelectronics. Applications include a wide swathe device applications, including active devices such as transistors and their electrical isolation, well passive devices, capacitors. In world dominated by Si-based technologies, the properties dielectric span several areas. Most recently, these high-permittivity transistor gate capacitor dielectrics, low-permittivity materials, inter-level metal operating at switching frequencies in gigahertz regime most demanding applications.
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