Fluorescent microanalytical system and method for detecting and identifying organic materials

摘要: A rapid, non-destructive system and method for insitu detection identification of luminescent organic particulates or films on non-luminescent devices, such as semiconductor wafers chips. The major optical components the comprises a vertical illuminator, an image device detector. is based principle that very large number materials luminesce when excited by ultraviolet radiation. By scanning emission spectra known used in manufacture, characteristic curve intensity versus wavelength obtained matched to curves materials, thereby permitting particulates.