Race track configuration and method for wafering silicon solar substrates
作者： Francois J. Henley , Adam Brailove
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摘要: A system for manufacturing free-standing films from work pieces. The includes a racetrack structure being configured to transfer at least one piece and or more accelerator-based ion implanters coupled the via an end station. Each of is introduce particles having energy greater than 1 MeV implant into surface loaded in station form cleave region piece. modules perform process release film along region. Additionally, output port each module free standing detached service connected structure.
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