Mechanical properties and Raman spectra of tetrahedral amorphous carbon films with high sp3 fraction deposited using a filtered cathodic arc
作者： Shi Xu , D. Flynn , B. K. Tay , S. Prawer , K. W. Nugent
DOI: 10.1080/01418639708241099
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摘要: Abstract The mechanical and structural properties of the tetrahedral amorphous carbon (ta-C) films deposited by filtered cathodic vacuum arc technique on silicon at room temperature have been studied over ion energy range 15–200 eV. High (about 80% or higher) sp3 bond fractions were obtained for almost all energies investigated (E > 50 eV), with a maximum about 87% 95 variations in correlated to fraction show an linear dependence small variation content. hardness, Young's modulus, stress critical load minimum friction coefficient coincide highest as determined electron-energy-loss spectroscopy. All are atomically smooth. Raman spectra these when fitted skewed Lorentzian, parameter Q, which measures degree skewness, is noticeably dependent sp2 content below 30% can also be used verify c...
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