Systematic variation of the Raman spectra of DLC films as a function of sp2:sp3 composition

作者: S. Prawer , K.W. Nugent , Y. Lifshitz , G.D. Lempert , E. Grossman

DOI: 10.1016/0925-9635(95)00363-0

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摘要: We report the Raman spectra of a set of hydrogen-free diamond-like carbon (DLC) films prepared under conditions that result in different types of carbon bonding and for which the sp 2 :…

参考文章(11)
J. Kulik, Y. Lifshitz, G. D. Lempert, J. W. Rabalais, D. Marton, Electron‐energy‐loss spectroscopy of mass‐selected ion‐beam‐deposited diamondlike carbon Journal of Applied Physics. ,vol. 76, pp. 5063- 5069 ,(1994) , 10.1063/1.357218
D Beeman, J Silverman, R Lynds, MR Anderson, None, Modeling studies of amorphous carbon Physical Review B. ,vol. 30, pp. 870- 875 ,(1984) , 10.1103/PHYSREVB.30.870
Pham V. Huong, B. Marcus, M. Mermoux, D.K. Veirs, G.M. Rosenblatt, Diamond-like films prepared by microwave plasma assisted chemical vapour deposition and by magnetron sputtering Diamond and Related Materials. ,vol. 1, pp. 869- 873 ,(1992) , 10.1016/0925-9635(92)90127-A
George L. Trigg, Steven J. Rothman, Roy Benedek, Simon R. Phillpot, Encyclopedia of Applied Physics Physics Today. ,vol. 47, pp. 60- 62 ,(1994) , 10.1063/1.2808750
Y. Lifshitz, G.D. Lempert, S. Rotter, I. Avigal, C. Uzan-Saguy, R. Kalish, The influence of substrate temperature during ion beam deposition on the diamond-like or graphitic nature of carbon films Diamond and Related Materials. ,vol. 2, pp. 285- 290 ,(1993) , 10.1016/0925-9635(93)90069-E
Y. Lifshitz, S. R. Kasi, J. W. Rabalais, Subplantation model for film growth from hyperthermal species: Application to diamond. Physical Review Letters. ,vol. 62, pp. 1290- 1293 ,(1989) , 10.1103/PHYSREVLETT.62.1290
Y. Lifshitz, G.D. Lempert, E. Grossman, I. Avigal, C. Uzan-Saguy, R. Kalish, J. Kulik, D. Marton, J.W. Rabalais, Growth mechanisms of DLC films from C+ ions: experimental studies Diamond and Related Materials. ,vol. 4, pp. 318- 323 ,(1995) , 10.1016/0925-9635(94)05205-0
François Rossi, Bernard André, A. van Veen, P. E. Mijnarends, H. Schut, Marie Paule Delplancke, W. Gissler, J. Haupt, G. Lucazeau, L. Abello, Effect of ion beam assistance on the microstructure of nonhydrogenated amorphous carbon Journal of Applied Physics. ,vol. 75, pp. 3121- 3129 ,(1994) , 10.1063/1.356164
D. G. McCulloch, S. Prawer, A. Hoffman, Structural investigation of xenon-ion-beam-irradiated glassy carbon. Physical Review B. ,vol. 50, pp. 5905- 5917 ,(1994) , 10.1103/PHYSREVB.50.5905
Y. Lifshitz, S. R. Kasi, J. W. Rabalais, W. Eckstein, Subplantation model for film growth from hyperthermal species Physical Review B. ,vol. 41, pp. 10468- 10480 ,(1990) , 10.1103/PHYSREVB.41.10468