作者: D.M. Huljic , D. Biro , R. Preu , C.C. Castillo , R. Ludemann
关键词:
摘要: Rapid thermal firing (RTF), i.e. of screen printed contacts using rapid processing (RTP), is a promising alternative compared to infrared heated conveyor belt furnaces concerning reduction in process time. In addition, due flexible design and in-situ temperature measurement, RTF well suited for detailed studies optimisation the contact formation. Exploiting advantages RTP such as high heating cooling rates short plateau times, authors have developed an with very total time 60 s less than 10 above 600/spl deg/C. Applying large area cells (100 cm/sup 2/) fill factors >78% been achieved even on shallow RTP-diffused emitters grid shading 7%. Contact resistivity mappings fired front confirm laterally homogeneous