作者: Dhego Banga , Youn-Geun Kim , John Stickney
DOI: 10.1149/1.3521463
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摘要: Electrochemical atomic layer deposition (E-ALD) has been used to deposit PbSe/PbTe superlattices, both with equal (4:4) and unequal (3:15) periods. The periods were formed from the repeated application of a PbTe E-ALD cycle four times, followed by PbSe times complete one period. period was as many desired form superlattice particular thickness. potentials layers Pb, Se, Te, for growth approximated first developing cycles binary compounds PbTe. Cyclic voltammetry (CV) individual elements are presented, coverages, function number Coverages based on charges elements. In each case, coverages found average very close monolayer per cycle. Deposits stoichiometric, electron probe microanalysis, relative elemental consistent ratio in Scanning tunneling microscopy revealed formation conformal hexagonal mesas, 240 nm wide atomically flat terraces gold glass substrates.